Synchrotron radiation (SR) is an invaluable metrology light source especial in the region of EUV and soft X-ray. The most advantage of Synchrotron radiation metrology is its continuous spectral. Spectral Radiation Standard and Metral beamline provides users continuous spectroscopy from 5-140nm region.This beamline comes from bend magnet, and naturally splits into two branchs. One branch is Spectral Radiation Standard and Metrology Beamline(BL08B). BL08B consists of front toroidal mirror (TM1) , entrance slit (S1) , spherical grating monochromator ( SGM) , exit slit (S2 ), back toroidal mirror(TM2), and reflectometer. SGM consists of three Laminar spherical grating (SG), cover the region of wavelength 5-140nm. The Sample Stage can rotate180 degree, and detector (Detec) can rotate 360 degree around Sample Stage. The filter can be fixed in front of reflectometer.BL08B is ready for optical element reflectivity, transmissivity and efficiency measurement; gas absorption cross section measurement; standard and transfer detector calibration.
